Plasma Diagnostics

PTL_UP is specializing in using several diagnostic techniques for the study of plasma processes.

The techniques that are currently used and some of their applications are:

Mass Spectrometry

- Principle & Setup

- Applications

Optical Emission Spectroscopy (OES)

- Why Do I need Spatial Resolution?

- Principle & Setup

- Rotational and Vibrational Spectra of Plasma Excited Species

- Spatially Resolved OES

- Temporally Resolved OES

Laser Induced Fluorescence (LIF)

- Principle & Setup

- Excitation Spectra of ground-state species

- Lifetime measurements

- Spatial Profiles of species

Fourier Transform Power and Impedance Analysis (FTPIA)

- Why do I need anything more than my SWR powermeter?

- Principle & Setup

- RF Power measurement and control

- RF Impedance measurements

- Electrical modeling of RF discharges

Laser Reflectance Interferometry (LRI)

- Principle

- In-Situ deposition rate measurement

- In-Situ etching rate measurement