Plasma Diagnostics

PTLUP is specializing in using several diagnostic techniques for the study of plasma processes.

The techniques that are currently used and some of their applications are:


Mass Spectrometry

- Principle & Setup

- Applications


Optical Emission Spectroscopy (OES)

- Why Do I need Spatial Resolution?

- Principle & Setup

- Rotational and Vibrational Spectra of Plasma Excited Species

- Spatially Resolved OES

- Temporally Resolved OES


Laser Induced Fluorescence (LIF)

- Principle & Setup

- Excitation Spectra of ground-state species

- Lifetime measurements

- Spatial Profiles of species


Fourier Transform Power and Impedance Analysis (FTPIA)

- Why do I need anything more than my SWR powermeter?

- Principle & Setup

- RF Power measurement and control

- RF Impedance measurements

- Electrical modeling of RF discharges


Laser Reflectance Interferometry (LRI)

- Principle

- In-Situ deposition rate measurement

- In-Situ etching rate measurement



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