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"Kinetics of a-Si:H
deposition" D. Mataras, D. Rapakoulias, S. Cavadias In proceedings of the 8th
International Symposium on Plasma Chemistry, Tokyo 1987 Edited by K. Akashi
and A. Kinbara (IUPAC 1987), p. 1484 (Oral Presentation)
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"Spatially resolved
diagnostics for the glow discharge deposition of a-Si:H" D. Mataras, S.
Cavadias, D. Rapakoulias In proceedings of the Euroforum-New Energies
Congress, Saarbrucken 1988 H. S. Stephens & Associates vol 3, p. 170 (Oral
presentation)
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"Spatially resolved LIF and
OES in silane discharges" D. Mataras, S. Cavadias, D.E. Rapakoulias In proceedings of the 9th International Symposium on Plasma
Chemistry, Pugnochiuso-Italy 1989 Edited by R. D' Agostino (IUPAC 1989),
p. 423 (Oral presentation)
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"Dilution effects in the
plasma-assisted CVD of a-Si:H" D. Mataras, S. Cavadias, D. E. Rapakoulias
In
proceedings of the 9th International Symposium on Plasma
Chemistry, Pugnochiuso-Italy 1989 Edited by R. D' Agostino (IUPAC 1989), p.
1293 (Poster Presentation)
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"Plasma assisted-CVD of a-Si:H
investigated by spatially resolved optical diagnostics" D. Mataras, S.
Cavadias, D. E. Rapakoulias In proceedings of the 9th European PV Solar Energy Conference
(EPVSEC), Freiburg 1989 Edited by W. Palz, G.T. Wrixon and P. Helm Kluwer Academic Publishers, p.87 (Poster
presentation)
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"Correlation of deposition
parameters and transport properties of a-Si:H films" P. Kounavis , E. Mytilineou , D. Mataras , S. Cavadias , D. Rapakoulias In proceedings of the 20th Int. Conf. Phys. Semiconductors, p. 2115 (1990)
(Poster presentation)
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"Correlation between
discharge geometry and film properties in PE-CVD of a-Si:H" D. Mataras, D.
Rapakoulias In Proceedings of the 10th European PV Solar Energy Conference
(EPVSEC), p.165 (1991) (Poster presentation)
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"Influence of the deposition
parameters to the gap state distribution and to the quality of PE-CVD of a-Si:H" P. Kounavis, N. Spiliopoulos, D. Mataras, E. Mytilineou, D. Rapakoulias In proceedings of the 11th European PV Solar Energy Conference
(EPVSEC), 1993 Harwood Academic Publishers p. 726 (Poster presentation)
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"Plasma-Surface interactions
during PECVD of hydrogenated amorphous
silicon" D. Mataras , F. Coutelieris, D. Rapakoulias In Proc. 11th International Symposium on Plasma Chemistry (ISPC), Loughborough 1993 J. Hary editor p. 1113 (IUPAC 1993) (Oral
presentation)
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"A Study of the surface
states and the defect formation mechanism in a-Si:H using CPM spectra" P.
Kounavis, D. Mataras, N. Spiliopoulos, D. Rapakoulias In proceedings of the 12th European PV Solar Energy Conference
(EPVSEC), Amsterdam 1994 p. 144 (1994) (Poster presentation)
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"Correlation between
Rotational, Gas and Surface Temperature in N2 plasmas" D. E.
Rapakoulias, D. Gerassimou, D. Mataras, S. Cavvadias In VDI Berichte 11166,
65-71 (1995) (Poster presentation)
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"Mass Spectroscopy and power
measurements for kinetics and mechanism investigation in Silane Glow
Discharges" N. Spiliopoulos, S. Stamou, D. Mataras, D. Rapakoulias In proceedings of the 12th International Symposium on Plasma
Chemistry (ISPC), Minneapolis 1995 Edited by J.V. Heberlein, D. W. Ernie, J. T. Roberts, p. 1927-1932 (Poster
presentation)
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"Improved method for the
measurement and control of the actual power dissipated in RF discharges" N.
Spiliopoulos, D. Mataras, D. Rapakoulias In proceedings of the 12th International Symposium on Plasma
Chemistry (ISPC), Minneapolis 1995 Edited by J.V. Heberlein, D. W. Ernie, J. T. Roberts, p. 2143-2148 (Oral
Presentation)
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"The charge state of the
dangling bonds dominating electron trapping and the kinetics of the defect
relaxation in a-Si:H" P. Kounavis, N. Spiliopoulos, D. Mataras, D. Rapakoulias In proc. 13th European PV Solar Energy Conference (EPVSEC), Nice-France, 1996
Edited by W. Freiesleben, W. Palz, H. A. Ossenbrink, P. Helm, Vol. I, p.
288-292 (Poster presentation)
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"Accurate determination of
the a-Si:H deposition process parameters" N. Spiliopoulos, S. Stamou, D.
Mataras, D. Rapakoulias In proc. 13th European PV Solar Energy Conference (EPVSEC), Nice-France
1996 Edited by W. Freiesleben,W. Palz, H. A. Ossenbrink, P. Helm, Vol. I, p.
292-295 (Poster presentation)
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"Influence of discharge
geometry on power dissipation in silane discharges" N. Spiliopoulos, D.
Mataras, D. Rapakoulias In proceedings of the 3rd International Conference on Reactive Plasmas, Nara-Japan
1997 Edited by K. Tachibana, Y. Watanabe, p. 93 (Poster presentation)
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"Plasma parameters derived
from electrical measurements in rf parallel plate argon glow discharges" N.
Spiliopoulos, D. Mataras, D. E. Rapakoulias In proceedings of TPP-4, "Progress in
Plasma Processing of Materials", p.183 Edited by Pierre Fauchais, Begell House Inc. (1997)
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"Specific problems of
rotational temperature determination in plasmas of large molecules" S. Stamou,
N. Spiliopoulos, D. Mataras, D.E. Rapakoulias In proceedings of TPP-4, "Progress in
Plasma Processing of Materials", p. 263 Edited by Pierre Fauchais, Begell House Inc. (1997)
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"Argon metastable profiles
using laser induced fluorescence in a controlled power RF discharge" D.
Mataras, N. Spiliopoulos, S. Stamou and D. E. Rapakoulias In proceedings of
the 13th International Symposium on Plasma Chemistry (ISPC),
Beijing, China 1997 Edited by C. K. Wu, Vol II p. 576-581 (Oral
presentation)
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"Power dissipation in
hydrogen diluted silane glow discharges" S. Stamou, N. Spiliopoulos, D.
Mataras and D. E. Rapakoulias In proceedings of the 13th International Symposium on Plasma
Chemistry (ISPC), Beijing, China 1997 Edited by C. K. Wu, Vol II p. 612-617 (Poster
presentation)
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"Space Energy sensitive in
situ diagnostics for thin film depositing silane discharges" S. Stamou, D.
Mataras, D. Rapakoulias In proceedings of the 14th European PV Solar Energy Conference
(EPVSEC),
Barcelona, Spain 1997 p. 644(Poster presentation)
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"Microcrystalline and
amorphous silicon deposition investigation using optical and electrical
diagnostics" S. Stamou, D. Mataras, D. Rapakoulias In proceedings
of the 15th European PV Solar Energy Conference (EPVSEC), Vienna, Austria 1998
(Poster presentation)
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"Simulation of plasma
enhanced chemical vapor deposition of microcrystalline silicon based on
optical diagnostics" E. Amanatides, S. Stamou, D. Mataras and D. Rapakoulias In proceedings of the 16th European PV Solar Energy Conference
(EPVSEC), Glasgow, UK 2000 p. 357(Oral presentation)
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"Power dissipation and
radical flux in the transition from highly crystalline to amorphous silicon
growth by PECVD" E. Amanatides, S. Stamou, S. Boghosian and D. Mataras In
proceedings of the 16th European PV Solar Energy Conference
(EPVSEC), , Glasgow, UK 2000 p. 581(Poster presentation)
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"Influence of
the variation of interelectrode space on the deposition of microcrystalline
silicon films in an asymmetric cell" E. Amanatides, D. Mataras and D. Rapakoulias In
proceedings of the 14th International
Symposium on Plasma Chemistry (ISPC), Prague, Czech Republic
1999 Vol. III, p. 1345-1350 (Poster presentation)
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"Total
pressure effect on hydrogen-diluted silane discharges, at high excitation
frequency" E.
Amanatides, D. Mataras and D. Rapakoulias In proceedings of the 14th
International Symposium on Plasma Chemistry (ISPC),
Prague, Czech Republic 1999 Vol. III, p. 1351-1356 (Poster presentation)
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"Application of Optical and
Electrical Diagnostics during the treatment of PET films in a Helium glow
discharge" D. Papakonstantinou, F. Arefi-Khonsari, D. Mataras and D.
Rapakoulias In proceedings of the 14th
International Symposium on Plasma Chemistry (ISPC), Prague,
Czech Republic 1999 Vol. IV, p. 1865-1869 (Poster presentation)
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"Study of hydrogen radio
frequency glow discharges under double layer conditions" A. Hammad, D.
Mataras and D. Rapakoulias In proceedings of the 15th
International Symposium on Plasma Chemistry (ISPC),
Orleans, France 2001 Vol. I, p. 53 (Oral presentation)
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"Surface simulation of Plasma
Enhanced Chemical Vapor Deposition of Microcrystalline Silicon Thin Films" E.
Amanatides, D. Mataras and D. Rapakoulias In proceedings of the 15th
International Symposium on Plasma Chemistry (ISPC), Orleans, France 2001 Vol. III, p. 873-878 (Poster presentation)
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"Ion etching of Polyethylene
Terephthalate films in helium glow discharges" D. Papakonstantinou and D. Mataras In proceedings of the 15th
International Symposium on Plasma Chemistry (ISPC), Orleans,
France 2001 Vol. VI p. 2421-2426 (Poster presentation)
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"Limiting factors of
microcrystalline deposition rate" E. Amanatides, A. Hammad, D. Mataras and D. Rapakoulias In proceedings of the 17th European PV
Solar Energy Conference (EPVSEC), Munchen, Germany 2001 (Oral presentation)
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"Combination
of Plasma Diagnostics and Modeling for the investigation of microcrystalline
silicon deposition process" D. Mataras, E. Amanatides, D. E. Rapakoulias In
proceedings of the 29th IEEE Photovoltaic Specialists Conference, New Orleans
2002 (Oral presentation)
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"a-SiNet:
the European Network on amorphous silicon device technology" J. Carabe, M. Schubert, D. Mataras, J. Andreu, F. Roca, D. Pribat
In proceedings of the 3rd
World Conference on Photovoltaic Energy Conversion, Osaka 2003, p. 1808
(Poster presentation)
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"Net total pressure effect on the
growth rate of hydrogenated microcrystalline silicon thin films"
A. Hammad, E. Amanatides, D. Mataras and D. E. Rapakoulias In proceedings of the 16th
International Symposium on Plasma Chemistry (ISPC), Taormina,
Italy 2003 (Poster presentation)
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"Electrical and Optical
Characterization of Highly Diluted Silane and Disilane
in Hydrogen RF discharges" A. Hammad, E. Amanatides, D. Mataras and D. E. Rapakoulias In proceedings of the 16th
International Symposium on Plasma Chemistry (ISPC), Taormina,
Italy 2003 (Poster presentation)
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"Etch rate
measurement of Polyethylene Terephthalate films treated in Helium and
Helium-Oxygen RF discharges" D.D. Papakonstantinou, E. Amanatides and D. Mataras In proceedings of the 16th
International Symposium on Plasma Chemistry (ISPC), Taormina,
Italy 2003 (Oral presentation)
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"2D self –
consistent modeling of microcrystalline silicon deposition process" B. Lykas, E. Amanatides, D. Mataras In proceedings of the 19th European
PV Solar Energy Conference (EPVSEC), Paris 2004, p. 1395 (Oral presentation)
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"High
Pressure Silane Depletion Technique as μc-Si:H Deposition Rate
Promoter-Advantages and Limitations" E. Katsia, E. Amanatides, D. Mataras, D. Rapakoulias In proceedings of the 19th European
PV Solar Energy Conference (EPVSEC), Paris 2004, p. 1601 (Poster presentation)
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"Power
consumption effect on the microcrystalline silicon deposition process: a
comparison between model and experimental results"
B. Lykas, E. Amanatides, D. Mataras, D. E. Rapakoulias
J. Phys.: Conf. Ser.
10 (2005) 198-201
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"Interelectrode space effect on power dissipation and silicon oxide thin
film growth from TEOS/O2 discharges"
A. Panou, E. Amanatides, D. Mataras, D. E. Rapakoulias
J. Phys.: Conf. Ser.
10 (2005) 202-205
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"On the
effect of the substrate pretreatment parameters on the composition and
structure of plasma deposited SiO2 thin films"
Ch. Voulgaris, E. Amanatides, D. Mataras, D. E. Rapakoulias
J. Phys.: Conf. Ser.
10 (2005) 206-209
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© |
These articles may be downloaded for personal use only.
Any other use requires prior permission of the author and the Publisher |
 |
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