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 Plasma Modeling: Self - Consistent Fluid and hybrid Models in PTLUP
Plasma Technology Laboratory has been involved to the development of self-consistent fluid and hybrid models since 2001. The self-consistent approach is required in order to simulate plasma reactors were typical plasma diagnostics measurements cannot be applied as medium and industrial scaled systems. Such types of models require a minimum number of inputs and counts for all physical and chemical processes that take place during the Plasma Processing of materials. PTLup model involves the following modules
Flow module
Equations: Navier –Stokes
Results: Flow field – Gas
velocity – Gas density distribution
Time: Slow
step ~ 1-2 sec
Heat module
Equations:
Heat conduction - convection – diffusion – radiation
Results:
Temperature and gas enthalpy maps
Time: Slow step ~
1-2 sec
Chemistry module
Equations:
Mass balance of species
Results:
Reactions rate, species density distribution, species flux
towards surfaces
Time:
Intermediate step ~ 1 – 300 msec
Plasma Module
Equations:
Mass balance of electrons and ions, Energy balance of electrons
and ions
Results:
Electrons and ions density distribution, ions flux towards
surfaces, electron –
molecule collision rates
Time:
Fast step ~ 1-10
μsec
Electromagnetic module
Equations: Poisson’s equation
Results:
Distribution of electrostatic field and voltage
Time:
Fast step ~ 1-10
μsec
The main problem of such type of simulation is the large scattering of time scales that are required for the convergence of the different modules and the extensive in some cases gas phase and surface chemistry of the processes. Advanced numerical algorithms are necessary for fast convergence while High Performance Computing systems and parallel processing are required especially in the case of industrial systems
PTLUP has already develop and use self-consistent model for the simulation of
Check here for some characteristic results and a presentation of the model!
Typical steps that are required for the simulation of the plasma process are:
Hit the links to see more information on these steps!
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