PTLUP is specializing in using several diagnostic techniques for the study of plasma processes. The techniques that are currently used and some of their applications are:
For more information....Please click on the bullets (collapsible outline):
Mass Spectrometry
Principle & Setup
Applications
Optical Emission Spectroscopy (OES)
Why Do I need Spatial Resolution?
Rotational and Vibrational Spectra of Plasma Excited Species
Spatially Resolved OES
Temporally Resolved OES
Laser Induced Fluorescence (LIF)
Excitation Spectra of ground-state species
Lifetime measurements
Spatial Profiles of species
Fourier Transform Power and Impedance Analysis (FTPIA)
Why do I need anything more than my SWR powermeter?
RF Power measurement and control
RF Impedance measurements
Electrical modeling of RF discharges
Laser Reflectance Interferometry (LRI)
Principle
In-Situ deposition rate measurement
In-Situ etching rate measurement
